Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering

International Journal of Innovative Research and Reviews

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Title Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering
 
Creator Razmi, Abbas
Yeşildal, Ruhi
 
Description Enhancement of scratch and hardness mechanical properties of TiN/TiCN/TiC multilayer thin films deposited on commercially pure Titanium (Cp-Ti) and silicon (Si) substrates via magnetron sputtering technique were investigated in this study. The structural, chemical and mechanical properties of the coatings were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), nanoindentation and scratch tests. Results of the XRD analysis showed reflections corresponded to cubic and polycrystalline structure for TiN/TiCN/TiC films. XPS analysis of the uppermost layer of TiN/TiCN/TiC film revealed that titanium nitride and titanium carbide were formed in the coatings. According to SEM cross-sectional images, the coatings demonstrated dense and columnar structure as well as good adhesion to the substrate with a thickness of 3.035 μm. Nanoindentation and scratch test results of TiN/TiCN/TiC coated on Cp-Ti substrate materials obtained 19.75 GPa and 21 N, respectively.
 
Publisher Muhammet Kaan YEŞİLYURT
 
Date 2021-07-15
 
Type info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
 
Format application/pdf
 
Identifier http://www.injirr.com/article/view/67
 
Source International Journal of Innovative Research and Reviews; Vol 5 No 1 (2021): The Marie Curie Issue; 15-20
2636-8919
 
Language eng
 
Relation http://www.injirr.com/article/view/67/52
 
Rights Copyright (c) 2021 Abbas Razmi, Ruhi Yeşildal
http://creativecommons.org/licenses/by-nc-nd/4.0
 

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