Surface micromachining of a micro electromechanical inertial transducer based on commercially available Floating Gate Transistor technology

Superficies y Vacío

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Title Surface micromachining of a micro electromechanical inertial transducer based on commercially available Floating Gate Transistor technology
 
Creator Abarca-Jiménez, Griselda Stephany
Romero-Paredes Rubio, Gabriel
Reyes-Barranca, Mario Alfredo
Alemán-Arce, Miguel Ángel
Munguía-Cervantes, Jacobo Esteban
Mendoza-Acevedo, Salvador
 
Subject FGMOS
surface micromachining
inertial sensor
 
Description This work presents the results of different surface micromachining processes done on a chip from On Semiconductor 0.5 µm commercially available CMOS technology. The intended objective is to fabricate a MEMS inertial transducer in a monolithic substrate, as the electronics for signal processing are based on a Floating Gate MOS transistor, fully integrated in the electromechanical structure. According to the available layers and design rules from the foundry, an inertial sensor chip was designed and fabricated, except the last post–processing step, i.e., the removal of the sacrificial layer and thus releasing the inertial structure based on a surface micromachining process, allowing the completed device to behave as designed.
 
Publisher Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
 
Date 2018-09-15
 
Type info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
Applied Research
 
Format application/pdf
text/xml
 
Identifier http://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2018_syv31_1-030048
10.47566/2018_syv31_1-030048
 
Source Superficies y Vacío; Vol. 31 No. 3 (2018); 48-51
Superficies y Vacío; Vol. 31 Núm. 3 (2018); 48-51
1665-3521
 
Language eng
 
Relation http://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2018_syv31_1-030048/179
http://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2018_syv31_1-030048/198
 
Rights Copyright (c) 2018 The authors; licensee SMCTSM
https://creativecommons.org/licenses/by/4.0
 

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