Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process

Revista elektron

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Title Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
Diseño y evaluación de un sensor Hall con diferentes geometrías de placas Hall en un proceso CMOS de 0,5 μm
Creator Ronis, Nicolás
García Inza, Mariano
Hall Plate; CMOS design; Solid state magnetic field sensor.

Hall Plate; CMOS diseño; Sensor de campo magnético de estado sólido.
Description An integrated Hall sensor was designed and fabricated in a 0.5μm CMOS ONC5N/F process provided by MOSIS. On it, four different Hall Plate geometries were integrated in order to analyze their sensitivity and resistance over temperature from -40°C up to 165°C. Furthermore, an amplifier and a current spinning system to remove the amplifier and Hall Plate offset were designed and placed in the same chip. The results show a better sensitivity performance in the cross-shaped Hall Plate and a linear behavior of the sensor in the range of operation tested.
Un sensor Hall integrado fue diseñado y fabricado en un proceso CMOS ONC5N/F de 0.5μm provisto por MOSIS. Dentro del mismo, cuatro placas Hall con distintas geometrías fueron integradas con el objetivo de analizar su sensibilidad y resistencia desde -40°C hasta 165°C. Dentro del mismo chip también se integraron y diseñaron un amplificador y un sistema de rotación de corriente para remover su offset. Los resultados muestran una mayor sensibilidad en la placa Hall con forma de cruz y un comportamiento lineal del sensor dentro de su rango de operación.
Publisher FIUBA

Date 2017-07-10
Type info:eu-repo/semantics/article

Format application/pdf
Source Elektron; Vol 1, No 1 (2017); 1-7
Elektron; Vol 1, No 1 (2017); 1-7
Language eng
Rights Copyright (c) 2017 Nicolás Ronis

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