Microwave Frequency Characterization of Barium Titanate Films Obtained Via Sol-Gel

Revista Facultad de Ingeniería

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Title Microwave Frequency Characterization of Barium Titanate Films Obtained Via Sol-Gel
Caracterización en frecuencia de microondas de películas de titanato de bario obtenidas vía Sol-Gel
 
Creator Marulanda-Bernal, José Ignacio
Gallo-Castrillón, Wilson Henry
Mosquera-Palacio, Diana Marybel
 
Subject dielectric constant
ferroelectrics
microwave materials
loss tangent
Sol-Gel
thin films
constante dieléctrica
ferroeléctricos
materiales en microondas
películas delgadas
Sol-Gel
tangente de pérdida
 
Description The present work focuses on the structural, morphological and dielectric characterization of barium titanate films (BTO or BaTiO3 due to its chemical formula) deposited by spin coating on crystalline silicon (Si) substrates and CPW resonators using the Sol-Gel technique with a Ba/Ti molar ratio of 0.5/0.5. The coplanar waveguides were manufactured on alumina substrates (Al2O3) with 3 mm of gold (Au) metallization using the laser ablation technique. The scanning electron microscopy (SEM) with X-ray energy dispersion spectrometry (EDS) showed the existence of a BTO film with an elementary composition of 14.62% barium and 5.65% titanium, with a thickness of 0.77 mm measured using the profilometric mode of the atomic force microscopy (AFM). Dielectric characterization was carried out by comparing the frequency response (parameter S21) of a CPW resonator with deposited BTO film and another reference resonator (without film) using a network vector analyzer (VNA). These measurements are compared in turn with computational simulations to obtain the dielectric properties. For the BTO film was determined a relative dielectric constant constant (er) of 160 with a loss tangent (Tand) of 0.012 for a frequency of 3.60 GHz. The dielectric constant constant and the ferroelectric property of the material produced are quite promising for applications in microwave circuits, such as miniaturization and tuning.
El presente trabajo se centra en la caracterización estructural, morfológica y dieléctrica de películas de titanato de bario (BTO o BaTiO3 por su fórmula química) depositados mediante la técnica que proporciona recubrimiento por medio de un sistema de rotación (spin coating) sobre substratos de silicio cristalino (Si) y resonadores CPW mediante la técnica Sol-Gel, utilizando una relación molar Ba/Ti de 0.5/0.5. Las guías de ondas se fabricaron sobre substratos de alúmina (Al2O3) con 3 mm de metalización en oro (Au) empleando la técnica de ablación láser. La microscopia electrónica de barrido (SEM) con espectrometría de dispersión de energía de rayos X (EDS) permitió evidenciar la existencia de una película de BTO con una composición elemental de 14.62 % de bario y 5.65 % de titanio, además de un espesor de 0.77 mm medido utilizando la modalidad perfilométrica de la microscopia de fuerza atómica (AFM). La caracterización dieléctrica se llevó a cabo mediante la comparación de la respuesta en frecuencia (parámetro S21) de un resonador CPW con película de BTO depositada y otro resonador de referencia (sin película) usando un analizador vectorial de red (VNA). Estas medidas se comparan a su vez con simulaciones computacionales para obtener las propiedades dieléctricas. Para la película de BTO se determinó una constante dieléctrica relativa (er) de 160 con tangente de pérdida (Tand) de 0.012 para una frecuencia de 3.60 GHz. La constante dieléctrica y la propiedad ferroeléctrica del material elaborado son características bastante promisorias para aplicaciones en circuitos de microondas, tales como miniaturización y sintonizabilidad.
 
Publisher Universidad Pedagógica y Tecnológica de Colombia
 
Date 2019-12-03
 
Type info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
 
Format application/pdf
application/pdf
application/xml
 
Identifier https://revistas.uptc.edu.co/index.php/ingenieria/article/view/10416
10.19053/01211129.v29.n54.2020.10416
 
Source Revista Facultad de Ingeniería; Vol 29 No 54 (2020): Continuos Publication; e10416
Revista Facultad de Ingeniería; Vol. 29 Núm. 54 (2020): Publicación Continua; e10416
2357-5328
0121-1129
 
Language eng
spa
 
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https://revistas.uptc.edu.co/index.php/ingenieria/article/view/10416/8926
https://revistas.uptc.edu.co/index.php/ingenieria/article/view/10416/8615
https://revistas.uptc.edu.co/index.php/ingenieria/article/view/10416/9217
 
Rights http://creativecommons.org/licenses/by/4.0
 

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